Draft
International StandardISO/DIS 4508
Surface chemical analysis — Scanning probe microscopy — Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements
Reference number
ISO/DIS 4508
ISO/DIS 4508
Edition 1
© ISO 2025
Proyecto Norma internacional
ISO/DIS 4508
80040
Este borrador de Norma Internacional se encuentra en la fase de consultas con los miembros de ISO.
Resumen
This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).
Informaciones generales
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Estado: En desarrolloEtapa: Cierre de la votación [40.60]
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Edición: 1Número de páginas: 13
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Comité Técnico :ISO/TC 201/SC 9ICS :71.040.40
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