Draft
International Standard
ISO/DIS 19383
Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
Reference number
ISO/DIS 19383
Edition 1
© ISO 2025
Draft International Standard
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Under development
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ISO/DIS 19383

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Format
CHF 65
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Abstract

This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.

General information

  • Status
     : Under development

    You can help develop this draft international standard by contacting your national member

    Stage
    : DIS ballot initiated: 12 weeks [40.20]
  • Edition
     : 1
    Number of pages
     : 13
  • Technical Committee :
    ISO/TC 107
    ICS :
    25.220.01 
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Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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